The semiconductor manufacturing process has extremely high requirements for etching gases. As chip manufacturing processes continue to shrink, the demand for high-precision etching is becoming more and more urgent. Hexafluorobutadiene (C₄F₆), as an advanced etching gas, plays an important role in the semiconductor etching process.
1. Application advantages
( 1 ) High etching selectivity : In semiconductor manufacturing, hexafluorobutadiene can etch different material layers with high precision. For example, when etching materials such as silicon dioxide and silicon nitride, it can selectively remove the target material with minimal damage to other materials. This is because the molecular structure of hexafluorobutadiene enables it to precisely interact with the chemical bonds of the target material during the etching reaction.
( 2 ) Fine etching capability : Hexafluorobutadiene performs well in etching circuit patterns at the submicron and nanometer levels. It can achieve very fine line etching, which helps to improve the integration of chips. For example, in chip manufacturing with a process of 10 nanometers and below, hexafluorobutadiene can etch complex circuit structures to meet the manufacturing requirements of high-performance chips.
2. Economic and environmental benefits
( 1 ) Reduce production costs : The use of hexafluorobutadiene can reduce side reactions during the etching process, thereby improving etching efficiency. This means that in large-scale production, the etching process time can be shortened and the operating cost of the equipment can be reduced. For example, compared with traditional etching gases, the use of hexafluorobutadiene can increase the production capacity of etching equipment by about 30%, which correspondingly reduces the etching cost per chip.
( 2 ) Good environmental performance : Hexafluorobutadiene produces relatively few decomposition products during the etching process and has less pollution to the environment. Its global warming potential (GWP) is low and meets environmental protection requirements. In the context of increasingly stringent environmental regulations, the use of hexafluorobutadiene can help semiconductor companies meet environmental standards and reduce greenhouse gas emissions.
3. Challenges and solutions
( 1 ) Supply stability : The production technology of hexafluorobutadiene is relatively complex, and there are currently few manufacturers in the world that can produce it on a large scale. Jiayuan is keenly aware of this, keeps up with market trends, and is more strict with itself in terms of production quality and production safety, so as to ensure stable supply of products while also guaranteeing product quality.
( 2 ) Safe storage and transportation : Hexafluorobutadiene is a high-pressure gas and is somewhat dangerous. Safety regulations must be strictly followed during storage and transportation. For example, special high-pressure gas containers must be used and transportation vehicles must meet safety standards. At the same time, companies need to provide safety training to relevant personnel to reduce safety risks.
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Company Name: Changzhou Jiayuan Chemical Co., Ltd.
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Country: China
Website: https://www.jy-chemical.com/